Handbook of Advanced Plasma Processing Techniques Hardcover - 2000 - 2000th Edition
by R. J. Shul (Editor); S. J. Pearton (Editor)
First line
Industrial applications of glow discharges have increased tremendously during the last third of the 20th century.
From the rear cover
This volume covers the topic of advanced plasma processing techniques, from the fundamental physics of plasmas to diagnostics, modeling and applications such as etching and deposition for microelectronics. The use of plasmas for patterning on a submicron scale has enabled successive generations of continually smaller transistors, lasers, micromachines, sensors and magnetic read/write heads that have formed the basis of our information age. This volume is the first to give coverage to this broad area of topics in a detailed fashion, especially in the rapidly expanding fields of micro-mechanical machines, photomask fabrication, magnetic data storage and reactor modeling. It provides the reader with a broad array of topics, authored by the leading experts in the field.
Details
- Title Handbook of Advanced Plasma Processing Techniques
- Author R. J. Shul (Editor); S. J. Pearton (Editor)
- Binding Hardcover
- Edition number 2000th
- Edition 2000
- Pages 655
- Volumes 1
- Language ENG
- Publisher Springer
- Date 2000-08-28
- Illustrated Yes
- Features Illustrated
- ISBN 9783540667728 / 3540667725
- Weight 2.32 lbs (1.05 kg)
- Dimensions 9.4 x 6.5 x 1.23 in (23.88 x 16.51 x 3.12 cm)
- Library of Congress Catalog Number 00038824
- Dewey Decimal Code 539
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