Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to Mev Energies Paperback - 2010
by Rainer Behrisch (Editor); Wolfgang Eckstein (Editor)
From the rear cover
This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed.
Details
- Title Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to Mev Energies
- Author Rainer Behrisch (Editor); Wolfgang Eckstein (Editor)
- Binding Paperback
- Edition Softcover reprin
- Pages 509
- Volumes 1
- Language ENG
- Publisher Springer
- Date 2010-11-23
- Illustrated Yes
- Features Illustrated
- ISBN 9783642079443 / 364207944X
- Weight 1.61 lbs (0.73 kg)
- Dimensions 9.21 x 6.14 x 1.06 in (23.39 x 15.60 x 2.69 cm)
- Dewey Decimal Code 530.41
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Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies (Topics in Applied Physics)
by Behrisch, Rainer (Editor) / Eckstein, Wolfgang (Editor)
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Sputtering by Particle Bombardment
- New
- Condition
- New
- ISBN 10 / ISBN 13
- 9783642079443 / 364207944X
- Quantity Available
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